HyperLithTM adds Wafer Topography Capabilities
  • Perfect for Double Patterning Simulations
  • Immersion bubble, reflective notching, non-planar resist surface, underlying structures
  • Calculate image-in-resist in the presence of topography rigorously with TEMPESTpr2
  • Hardware Acceleration and Parallel Processing
  • Powerful 3D geometry editor lets user define and visualize the wafer geometry
  • See the demo video
HyperLithTM Simulator!
  • Easy-to-use and Powerful
  • Supports scalar and rigorous, EUV and DUV technologies
  • Hardware Acceleration, Parallel Processing, Distributed Computing
  • Windows & Linux 32/64 bit
  • Use pre-defined mask technologies and patterns or create your own
  • Export .sim file for EM-Suite
  • Click here for a demo video and more details


Panoramic Technology Celebrates 10th Anniversary!

Why Choose Panoramic?