PanTune
- Calibrate your resist models by finding parameters to make your simulated results match your measured results.
- Can be used to calibrate any resist model (Full Physics, Diffused-Image Model, Chemically Amplified Lumped Parameter Model, Panoramic Resist Model)
- Able to use the full power of HyperLith's rigorous mask models (mask 3D effects), and realistic scanner models in the tune
- Easily import empirical data from file or by cut & paste
- Set valid limits on both empirical and simulated data
- Works with SimRunner (ie. distributed/network computing)
- User has complete access to the results - no encrypted secret resist model parameters.
- Save money and time by calibrating your resists in-house
- Keep your resist calibration expertise in-house
User-Written Resist Models (UWRM)
- develop your own resist models in-house
- simple, yet powerful Java(tm) application programming interface (API)
- expose your "knobs" as yellow fields in the HyperLith or EM-Suite GUI
- thin or thick, aerial image or image-in-resist based models allowed
- return development time level-set function, or development rate and let HyperLith do the development for you
- many examples to work from
- high level of support (including help with coding) offered by Panoramic
ARMI Demo Video #1 - UWRM
{flv}demos/armi1{/flv}
ARMI Demo Video #2 - PanTune (video is black for first 15 seconds)
{flv}demos/armi2{/flv}