Rigorous EMF Option

rcwa graphic box smallGraphicBox_TEMPESTpr2

  • Includes FDTD (TEMPESTpr2), RCWA and QuasiRig(TM)
  • Rigorous modeling of mask scattering (FDTD, RCWA)
  • Fast quasi-rigorous modeling of mask scattering (QuasiRig)
  • Rigorous modeling of wafer topography  (FDTD)

TEMPESTpr2

  • Distributed computing with SimRunner
  • NVIDIA GPU Hardware Acceleration Available
  • Fourier Boundary Condition (FBC) for fast, accurate EUV mask modeling

 RCWA

  • 2D and 3D implementation
  • fast for small domains
  • very accurate

QuasiRig(TM)