The easy-to-use HyperLithTM simulator is also very powerful. Watch our demo videos to see just how easy-to-use it is:
Contact us for a live online or in-person demonstration of our latest release
Key Features
- Very easy to use yet still flexible and powerful
- Choose from a selection of pre-defined mask technologies, patterns and resist models customize a pre-defined technology or pattern, or create your own from scratch
- Simplified graphical user interface is oriented specifically towards mask-in-stepper lithography simulations
- LiveView GUI allows user to see an approximate simulation results for the nominal case
- Works with SimRunner (distributed computing and hardware-acceleration)
- DUV, Immersion, EUV, Rigorous/Scalar, Polarization, Aberrations, Resist Capable
- Can export a .sim file for EM-Suite
- 32/64 bit Windows/Linux
HyperLith Screen Shots
