Options to HyperLith (Main GUI for Mask-in-Stepper simulations)
- Rigorous EMF (TEMPESTpr2 FDTD + RCWA + QuasiRig)
- Resist
- Gazillion (GDS/OASIS layouts)
- SOAPI (Java/MATLAB/Python/Octave programming interface)
- SimRunner/PSS (Parallel processing/distributed computing)
- HSS (NVIDIA GPU hardware acceleration)
- ARMI (PanTune+UWRM)
- PanOPC (small area OPC)
- PanSO (free form source optimizer)
- Advanced EUV Mask Models (PEUV, QEUV, QRCWA)
Options to EM-Suite (main GUI for general EM simulations)
- Rigorous EMF (TEMPESTpr2 FDTD + RCWA)
- Resist
- Gazillion (GDS/OASIS layouts)
- SOAPI (Java/MATLAB/Python/Octave programming interface)
- SimRunner/PSS (Parallel processing/distributed computing)
- HSS (NVIDIA GPU hardware acceleration)
- ARMI (PanTune+UWRM)
- PanOPC (small area OPC)
- PanSO (free form source optimizer)
- Advanced EUV Mask Models (PEUV, QEUV, QRCWA)
KeyServer
-network license option
Stack
-main GUI for film stack analysis
-included for free with EM-Suite or HyperLith
-an accessory program
MatMan
-GUI for managing material database
-included for free with EM-Suite or HyperLith
-an accessory program