panoramictech.com

  • Simulate SEM image formation
  • Physics-based model
  • Including SEM-induced shrinkage
  • Calibrate resist models by comparing simulated SEM CD to experimentally measured SEM CD (an "apples to apples" comparison)
  • Includes PanSIA
  • See video!
  • See presentation!
You are here: Home Products HyperLith PanSEM