Aggregation - new in v5.00_r2007.09.XX (available end of September 2007)

• Automate many of the post-processing steps you normally do on the data-series list (i.e. make measurements, sum images, generate Bossungs, FEMS and process window information)
• Set up the simulation to automatically output meaning end-result data
• See two demo videos:
  • Attenuated PSM line/space pattern (generate process window)
  • Alternating PSM line/space pattern (generate overlapping process window)