Frequently Asked Questions
Who/What is Panoramic Technology Inc.?
What Products does Panoramic Technology Inc. Offer?
How does Panoramic Software differ from other commercial lithography simulation packages?
Who uses Panoramic Technology software?
What types of things can be simulated with EM-Suite?
Why does Panoramic offer OPC? Is Panoramic moving into the EDA space?
What platforms/systems are supported?
How much does the software cost?
Who/What is Panoramic Technology Inc.?
Panoramic Technology Inc. is a software company that offers advanced semiconductor lithography simulation software. The company was founded in 1999 and is the leader in 3D rigorous lithography simulation. The main product, EM-Suite is used world wide by lithographers to study various aspects of photolithography.
What Products does Panoramic Technology Inc. Offer?
The main product is called EM-Suite to which various options can be added.
- EM-Suite - the core package includes mask geometry editor, scalar mask modeling, full-vector optical imaging, metrology, visualization and data post-processing capabilities. This is the minimal package.
- TEMPESTpr2/Rigorous Option - rigorous analysis of the photomask, allows user to simulate scattering of light from a 3D geometry
- Resist Option - physical resist model involving resist exposure, PEB diffusion-reaction equation and development models.
- Gazillion Option - mask layout viewer/editor - import GDS-II, work directly from layout
- PanOPC Option - a pair of optical proximity algorithms suitable for small area correction
- Gazim Option - Hopkins-based full vector imaging
- SOAPI Option - external control via MATLAB, Java or C API
- KeyServer Option - network license
- SimRunner Options - distributed computing across a network of workstations
How does Panoramic Software differ from other commercial lithography simulation packages?
Simply put: Panoramic Software is more flexible, more powerful, better supported and costs much less than competing packages. Contact us and we'll prove it.
Who uses Panoramic Technology software?
Our customer base is over 100 users world-wide. Customers include:
- Major semiconductor manufacturers
- Equipment Manufacturers (Inspection, Stepper, Metrology)
- Mask Makers
- EDA Companies
- Research Consortiums
- Government Labs
- Consultants
- Universities
What types of things can be simulated with EM-Suite?
The software is very flexible and can simulate many aspects of lithography including:
- Alternating, Attenuating, Chromeless Phase Shift Masks
- EUV masks (absorber pattern and multilayer mirror defects)
- Stepper Alignment Systems
- Mask and Wafer Inspection Systems
- Scatterometry, Gratings, Pinholes etc.
- Systems with immersion, bi-refringence, broadband light
- Chemically amplified and non-chemically amplified resists
Why does Panoramic offer OPC? Is Panoramic moving into the EDA space?
Our newest product is PanOPC which allows a researcher to apply model-based optical proximity correction to a small area of a layout. We offer two algorithms, one that allows very smooth movement of the mask features ("continuous segmentation") and another which maintains a Manhattan pattern.
The PanOPC is a useful tool for researches because at today's lithography node, it is meaningless to simulate uncorrected mask patterns. Any measurement of process window will be completely inaccurate if based on uncorrected patterns for all but the simplest patterns. With PanOPC, researchers can correct a critical portion of the mask (using rigorous mask model and resist simulation if required) and then get meaningful information from the subsequent analysis.
Panoramic is not attempting to move into the EDA space - i.e. full-chip correction. This is a small-area tool to be used by researchers analyzing very small subsets of mask patterns (i.e. a bit-cell).
What platforms/systems are supported?
Initially the software is purchased along with a "1-Year License Maintenance Support Service" (LMS).
The software will be functional for 1 year. The LMS must be purchased each year to keep the software functional.
An indefinite license option is available (i.e. software is indefinitely functional)
During the periods where the LMS is active, users have access to customer support and updates.
How much does the software cost?
You will discover that our software is only a fraction of the cost of comparable packages. Volume discounts are available. Please contact us for a quote.